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Nightmare Fuel: Star Wars
That looks rather painful.
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Emperor Palpatine/Darth Sidious was arguably the most terrifying character in the entire franchise. Palpatine seems to be the most needlessly evil, and outright cruel character. It is virtually uncountable the number of deaths orchestrated by himself. He orchestrated every atrocity that occurs throughout the franchise.
He is a resemblance of power-hungry, selfish politicians in the real world (past, present, and future), and his force lightning is absolutely terrifying - so terrifying that only Yoda has managed to push it off.
The Expanded Universe implies that also killed his own parents and siblings, showing how monstrous he really is.
Worse, in the film, Darth Vader himself says that the Emperor is not as forgiving as him.
Throughout the films, we find out he is behind almost all the bad things that happen—he engineered the invasion of his own home planet, started the Clone Wars and used the start of the war to gain considerable emergency powers, nearly annihilated the Jedi Order including the children, turned Anakin to the Dark Side, killed and disposed his loyal Separatist allies when he had no use for them anymore and made the Republic into a fascist dictatorship ruling by fear and using planet-destroying superweapons like the Death Star against anything with the idea of dissenting and personally destroying entire populations that conspire against him. He only has loyality to himself—it is implied in Episode VI that he treated Darth Vader as expandable when Luke defeated him and wanted to make Luke his apprentice instead while leaving Vader to die.
To get an idea on how terrifyingly evil Palpatine is, his own actor directly compares him to the Devil. Not just that, but he claims that Palatine is more evil.
Revenge of the Sith, being easily the darkest in the prequel trilogy if not the whole series, has clear cases of this.
Anakin decapitating Count Dooku in order of Palpatine.
The horrific ruthlessness of the clone. Surprisingly, according to the monologue in Star Wars Battlefront 2,troopers kind of disliked Ki-Adi-Mundi, but what about Obi-Wan? According to the cartoon, he and Cody were allies and friends for YEARS and he had no hesitation in fulfilling the order 66. The fact that the clones could be your friends, but be absolute obedient to the point where they will do anything is huge Paranoia Fuel and just plain disturbing.
Anakin's implied-but-not-actually-shown murder of the children in the Jedi temple during this scene.
His march to the Jedi Temple (With hundreds of Clones in tow) was not much better. While not directly nightmare-inducing, you just tell just by watching (And thanks to Mr. John Williams, hearing) that things are only going to get worse...
Consider this: for many children, both Revenge of the Sith and The Empire Strikes Back are probably the first films they've ever seen in which the bad guys actually win; the heroes are either dead or have barely escaped with their lives.
Minor in comparison to the ones above, but in the beginning battle when Obi-Wan and Anakin are fighting their way onto Grievous's command ship. They get attacked by a group of Buzz Droids, tiny droids that like to tear things (including ships and droids) apart. R2 is able to fight them off pretty easy, but R4 ends up getting it's head torn off and sent flying into space squealing all the way. Obi-Wan looks quite perturbed after having witnessed it.
Obi-Wan: Oh, dear...
When Anakin kills Dooku, he's highly conflicted about it. When Vader kills the council in the book, he doesn't bat an eye. In fact, he makes little quips about it. Remarkably funny quips.
The death of General Grievous was pretty graphic for a PG-13 film. First, Obi-Wan rips his chest plating open, exposing the working organs suspended in life-preserving gel. After he gets thrown away, Obi-Wan uses his Jedi powers to snatch one of the General's heavy blasters. He fires a shot right into his chest, the General reaching down to grasp at the now burning organ sack, before Obi Wan keeps firing. By the end of his shots, the General has jets of flames shooting out of his eye sockets before he crashes to the deck, every organic part in his body charred to ashes.
A New Hope has the IT-O interrogator droid used to interrogate Leia. Interesting euphemism, "interrogator droid". The radio adaptation actually shows us Vader's mind probe-assisted interrogation of Leia, and it's terrifying. First, he tries to convince her he's another rebel who needs to know where the Death Star plans are, before just causing her horrible pain.
During this moment in the NPR version, Vader attempts to invoke her loyalty to her father. If you've seen the movies and know the truth, it's rather chilling.
The dianoga (the creature in the trash compactor).
The sight of the charred corpses of Owen and Beru. It is very brief; you could easily miss it; but it's there all right.◊
Especially the wampa. Look at it◊. Especially when Luke is hanging helpless from the ceiling while the wampa is gnawing on his tauntaun nearby, and, before he can grab his lightsaber, it looks up, pauses, then starts slowly advancing towards him.
Vader killing Admiral Ozzel. We've seen him use the Force-choke before but this is more chilling because he's able to do it through a video screen! He doesn't even have to be in the same room to kill you, just establish a line of sight. What are the limits to this? Can he choke someone from across a galaxy?
When Han starts flying the Millenium Falcon out of the asteroid, only to discover that they were inside a giant space slug the entire time.
The moment when Luke, disregarding Obi-Wan and Yoda's warning that he has no chance against Darth Vader, leaves to help his friends in the Sith Lord's clutches. Specifically, when Yoda contradicts Obi-Wan's comment about Luke being their last chance with "No, There Is Another.'" At that point, your horror for Luke will spike when you realize the kid has just lost his Plot Armor.
The moment when Luke faces Vader in the carbon-freezing chamber. Specifically, when Vader knocks Luke down the stairs early in the fight, Vader leaps at him like a dark wraith from your deepest nightmares.
Then there's Vader's wham line. In the mind of a child, the very possibility of such a terrifying villain being the father of the hero must seem abhorrent.
The whole carbon freezing scene. The atmosphere is, frankly, hellish, with red lights and steam galore. Han's forced into the chamber after sharing a last kiss with Leia, the process starts, he's obscured by the carbon mist. When the process is complete claw reaches in, pulls out a slab, it's pushed over and lands hard with a clang - first part of a double shock, because we have a lovely close up of Han's face, frozen in pain and fear, trying to ward off his fate despite himself. Lando specifically says the process can kill him and that Vader is testing it to make sure it won't kill Luke. Luke proceeds to get stuck in the carbon freezer as Vader pulls the switch. Thank God Luke got out of there in time and didn't suffer the same fate Han did.
How about the part where Luke is hanging for dear life from the underside of Cloud City? Not only was there no way for him to get back up, but there was no one nearby to save him! If it weren't for his use of the Force to send Leia back for him, he would've been close to falling down through a gas giant, i.e. a planet with no solid ground whatsoever, just layer after layer of potentially poisonous gases.
The EU says, Darth Maul survived that experience. Imagine going through that and no one comes to help you until YEARS later after you have gone almost completely insane. Family unfriendly indeed.
In The Phantom Menace, in the climax when the Nabooean pilots make off in their recently-liberated fighters, one of them takes a hit from a gun turret and loses an engine, plummeting helplessly to a fiery crash in the valley below. Imagine what those last moments had to be like for the pilot.
Attack of the Clones:
Anakin killing the Tusken Raiders, not just the men, but the women and the innocent children too.
The Dark Side ending of the first game from The Force Unleashed. After killing Darth Vader, Starkiller tries unsuccessfully to attack Palpatine. Next thing he knows, Palpatine grips the Rogue Shadow with the Force and, with Juno Eclipse still inside the ship, throws it on top of Starkiller. The last thing Starkiller sees is darkness until he wakes up on an operating table, finding himself being clad in a suit of life support armor. Add some last-second Eye Scream, and you'll wish you'd chosen a different final boss.
The second game's Dark Side ending would also count for some. Starkiller raises his lightsaber, ready to end the threat once and for all. Suddenly, a blood-red lightsaber emerges from Starkiller's chest. The attacker decloaks, revealing a hooded figure. RahmKota charges. The hooded figure whips around, blocks all his attacks, and flings him into his Rebel escort. Then, he sends them flying to the ocean below. Vader stands over Starkiller, and says that he lied when the cloning process hadn't been perfected. The hooded figure reveals himself. His face is a perfect image of Starkiller, only devoid of ANY emotion. That has to give one chills.
There was a webcomic called Evasive Action, which described the lives of three Padawans who survived Order 66 and went into hiding. They were on Felucia when Order 66 was issued, and in a convenient spot to watch Aayla Secura get shot down by her own troops◊. Take a look at the background image of Aayla's Dies Wide Open expression... yeah.
Destiny's Way mentions some of the critters employed in the Yuuzhan Vong Sentient Sacrifice. Flaying knives, flesh-eating beetles... We knew already that it wasn't a barrel of laughs, these being the Yuuzhan Vong and all, but still...
The Star Wars: The Clone Wars shows Darth Maul survived like stated above, but we get to see the pleasant details of the aftermath of the experience and the results of it. Darth Maul is insane, looks like S***, made barely functional mechanical legs for himself, was being manipulated by a local resident, get his spider legs replaced by a Sith magician in probably the most painful way imaginable, him going on a WIDE and merciless killing spree with his brother, all the horrible deeds he does after that including almost killing Obi-Wan, and finally ending with him undergoing Cold-Blooded Torture by Sidious. There's a reason he is listed as a MAJOR Knight of Cerebus.
Joruus C'baoth's Mind Rape of General Covell. Imagine a military officer having to relearn the concept of obedience!