Andromeda Stories is a sci-fi themed anime which first aired in 1982.
This show provides examples of:
Cyborg: The Elder and Il while both seeming human at first, turn out to be cybernetic in nature.
Panspermia: as Earth is seeded with life when the twins Jimsa and Affle crash land and perish after escaping the destruction of their homeworld, located in the Andromeda galaxy.
Utopia Justifies the Means: The initial antagonists, the machines, want to bootstrap humanity into a paradise of eternal bliss and happiness, while destroying all those who oppose them. It is later revealed that the Elder can also be considered a villain as he wants nothing but the destruction of all machines, even those which are beneficial to humanity, to bring in an era of human only rule
Transhuman Treachery: Lilia the queen and mother of the twins embraces and joins the machines in a state of bliss, initially urging the twins to join her before finally wishing them luck on their journey to the stars and expressing no fear at her coming demise.